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OSI

VLS-1    MV-500   MV-215    MV-15    MV-10    MV-7   Metra

Metra

The Metra is designed as a fully- automated Overlay Registration and Critical Dimension Measurement System. 


High throughput, Class 1 Cleanroom compatibility, and ease of use make this an excellent tool for high volume production fabs.

Metra
Metra

Please contact us so that we may answer specific questions, or provide you with more information on the Metra

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VLS-1 / VLS-2 Video Linewidth System

The VLS-1 has been used in the industry for over 18 years, and is still the main source of CD (Critical Dimensions) process control in several fabs around the world.

VLS-1
VLS-1


The VLS-1 Provides fast and repeatable measurements on wafers, photomasks, thin film heads and other small geometry applications.


The VLS-2 is the newest member
of the VLS family, and improves on it's predecessor by upgrading the microscope, which provides a smoother stage, more robust illumination and an automated objective changer.

VLS-2
VLS-2

The VLS-1 / VLS-2 is calibrated to NIST traceable mask standards.  The system has user specific program calibrations that give you maximum calibration flexibility.

The systems high reliability is due to the simple design and very few moving parts.

The system consist of the following components:

  • CCD camera and image rotation system.
  • Piezo driven autofocus mechanism.
  • Nikon Optiphot 66 Microscope
  • Electronics control chassis
  • 12" CRT for menu and video display.

Specifications

  • Measurement range : 0.7-200um
  • Measurement precision:
         Wafers sigma = 0.010um
         Masks sigma = 0.005um
  • Measurement time: 4 seconds for 3um line, including auto-illumination and auto-focusing

Please contact us so that we may answer specific questions, or provide you with more information on the VLS-1

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Microvision 500 (MV-500)

The MV-500 uses the same measurement techniques as the VLS-1. The main differences are in the autofocus and wafer handling systems.

MV-500
MV-500


The MV-500 uses a solid state diode laser to perform autofocus. This technique allows for automated focus control and allows for selectable program focus to achieve the best focal plane for obtaining repeatable measurements.

The wafer handling uses a special stage to deliver the wafer under the objective and offers the option of manual or auto loading from a cassette in some configurations.

Specifications:

  • Measurement range : 0.7-200um
  • Measurement precision:
         Wafers sigma = 0.010um
  • Measurement time: 4 seconds for 3um line, including auto-illumination and auto-focusing

Please contact us so that we may answer specific questions, or provide you with more information on the MV-500.

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Microvision 215LL (MV-215LL)

The MV-215LL is a merging of the MV-15 Inspection Station with the VLS-1. The MV-215LL is similar to the MV-500 in the use of a solid state diode laser to perform autofocus. This technique allows for automated focus control and allows for selectable focus to achieve the best focal plane for obtaining repeatable measurements.


The MV-215LL configuration allows the user the flexibility of an inspection and CD measurement system in one system.

MV-215

Specifications

  • Measurement range : 0.7-200um
  • Measurement precision:
         Wafers sigma = 0.010um
  • Measurement time: 4 seconds for 3um line, including auto-illumination and auto-focusing

Please contact us so that we may answer specific questions, or provide you with more information on the MV-215LL.

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Microvision 15 (MV-15)

MV-15 Inspection Station is a programmable system for rapid high magnification inspection of semiconductor wafers.

MV-15


The MV-15 uses a HeNe spot laser to perform autofocus, and a specially designed transfer system to deliver the wafer under the objective. 

The system also has a four-cassette loader system that allows for wafer sorting.

Please contact us so that we may answer specific questions, or provide you with more information on the MV-15.

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Microvision 10 (MV-10)

MV-10 Inspection Station is a semi-automated system for rapid high magnification inspection of semiconductor wafers. The MV-10 uses a HeNe spot laser to perform autofocus, and a specially designed transfer system to deliver the wafer under the objective. The system also has a four-cassette loader system that allows for wafer sorting.

Please contact us so that we may answer specific questions, or provide you with more information on the MV-10.

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Microvision 7 (MV-7)

The MV-7 Inspection Station is a semi- automated system for rapid high magnification inspection of semiconductor wafers.

The MV-7 uses a HeNe spot laser to perform autofocus, and a specially designed transfer system to deliver the wafer under the objective.The system also has a single cassette loader system that allows for wafer loading.

Please contact us so that we may answer specific questions, or provide you with more information on the MV-7.

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